ГЕКСАФТОРАЦЕТИЛАЦЕТОНАТ БАРИЯ

Description

Barium hexafluoroacetylacetonate (barium hexafluoro-2,4-pentanediionate) is an organometallic complex of barium with fluorinated beta-diketone, formula C10H2BaF12O4, Ba(CF3COCHCOCF3)2. Related to compound CAS 314071-48-2, differs by registration number and specified batch purity.

Basic Attributes

• CAS No: 118131-57-0
• Chemical formula: C10H2BaF12O4
• Molecular weight: 551.43
• Exact weight: 551.88100
• PSA Specifications: 52.60000
• XLogP3: 4.08980

Physico-chemical characteristics

• Appearance: White powder
• Melting point: 250 °C (with decomposition, lit.)
• Boiling point: 220°C
• Flash point: 22.8°C

Scope of application

Like other fluorinated barium beta-diketonates, the compound is used as a volatile precursor for chemical vapor deposition (CVD) of thin films containing barium in the production of electronic and optical components. The high volatility of the complex is associated with fluorination of the ligands, which reduces intermolecular interactions in the solid phase. In the production of dielectric films of barium-strontium titanate, the use of fluorinated precursors is limited due to the risk of incorporation of fluoride ions into the oxide lattice and deterioration of the dielectric characteristics of the finished material.

Difference from related compound

Lots with CAS 314071-48-2 and CAS 118131-57-0 correspond to the same Ba(hfac)2 complex, but are registered separately due to differences in the method of preparation, form of delivery and declared purity. For the consumer, this means the need to check the specific CAS number in the accompanying documentation of the batch, since volatility and decomposition temperature may vary slightly depending on the content of impurities and residual moisture.

Mechanism of action as a precursor

When heated in a flow of inert or oxidizing gas, the complex evaporates and decomposes on the substrate with the deposition of a barium-containing oxide layer, and the volatile fluorocarbon fragments of the ligand are removed with the flow of carrier gas. This mechanism of substance transfer through the gas phase without direct contact of the solution with the substrate ensures high uniformity of the thickness and composition of the resulting film over a large area.

Safety Information

• Packing level: III
• Hazard category: 6.1
• Transport code: UN1564
• WGK Germany: 1
• Hazard class code: 20/22
• Safety instructions: 28
• Tags: Xn, Xi
• Hazard Note: Irritant

Storage and transportation

Store in a dry, cool, ventilated area in an airtight container, away from heat sources - flash point 22.8°C requires careful handling at elevated temperatures. When working with powder, use protective gloves and goggles, avoid inhaling dust and getting inside. Transported as a toxic substance of class 6.1, UN number 1564, packing group III.